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Microelectromechanical systems advanced materials and fabrication methods /

Corporate Authors: National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems., ebrary, Inc.
Format: Book
Language:English
Published: Washington, DC : National Academy Press, 1997.
Subjects:
Microelectronics > Materials.
Microelectromechanical systems > Design and construction.
Online Access:http://site.ebrary.com/lib/ucy/Doc?id=10055038

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