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01126nam a2200217 a 4500 |
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971103s1997 dcua sb 000 0 eng d |
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|z 0585002509 (electronic bk.)
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|a CaPaEBR
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| 050 |
1 |
4 |
|a TK7874
|b .N333 1997eb
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| 110 |
2 |
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|a National Research Council (U.S.).
|b Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems.
|
| 245 |
1 |
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|a Microelectromechanical systems
|b advanced materials and fabrication methods /
|c Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
|
| 260 |
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|a Washington, DC :
|b National Academy Press,
|c 1997.
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| 300 |
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|a xiv, 61 p. :
|b ill.
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| 504 |
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|a Includes bibliographical references (p. 51-55).
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| 650 |
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0 |
|a Microelectronics
|x Materials.
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| 650 |
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0 |
|a Microelectromechanical systems
|x Design and construction.
|
| 710 |
2 |
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|a ebrary, Inc.
|
| 856 |
4 |
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|u http://site.ebrary.com/lib/ucy/Doc?id=10055038
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| 952 |
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|a CY-NiOUC
|b 5a0457556c5ad14ac1ecf360
|c 998a
|d 945l
|e -
|t 1
|x m
|z Books
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