Description: Microelectromechanical systems

Corporate Authors:	National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems., ebrary, Inc.
Format:	Book
Language:	English
Published:	Washington, DC : National Academy Press, 1997.
Subjects:	Microelectronics > Materials. Microelectromechanical systems > Design and construction.
Online Access:	http://site.ebrary.com/lib/ucy/Doc?id=10055038

Physical Description:	xiv, 61 p. : ill.
Bibliography:	Includes bibliographical references (p. 51-55).