MEMS/NEMS: handbook techniques and applications/
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York:
Springer,
c2006
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| Subjects: |
Table of Contents:
- V. 1. Design methods
- v. 2. Fabrication techniques
- v. 3. Manufacturing methods
- v. 4. Sensors and actuators
- v. 5. Medical applications and MOEMS.