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| LEADER |
00933nam a2200217 a 4500 |
| 001 |
1539866 |
| 005 |
20171111233629.0 |
| 008 |
060717m2006 cy da r 000 u eng d |
| 020 |
|
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|a 0387245200
|q hbk.
|
| 040 |
|
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|a CY
|b University of Cyprus
|e AACR2
|
| 050 |
|
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|a TK153.M446 2006
|
| 240 |
1 |
0 |
|a MEMS/NEMS handbook
|
| 245 |
1 |
0 |
|a MEMS/NEMS:
|b handbook techniques and applications/
|c edited by Cornelius T. Leondes
|
| 246 |
1 |
8 |
|a MEMS/NEMS handbook
|
| 260 |
|
|
|a New York:
|b Springer,
|c c2006
|
| 300 |
|
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|a 5 v. :
|b ill. ;
|c 24 cm.
|
| 504 |
|
|
|a Includes bibliographical references and index.
|
| 505 |
0 |
|
|a V. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS.
|
| 650 |
|
0 |
|a Microelectromechanical systems
|x Design and construction
|
| 700 |
1 |
|
|a Leondes, Cornelius T.
|
| 952 |
|
|
|a CY-NiOUC
|b 5a042f956c5ad14ac1e8a637
|c 998a
|d 945l
|e TK153.M446 2006
|t 5
|x m
|z Books
|
