Cover Image

MEMS/NEMS: handbook techniques and applications/

Other Authors: Leondes, Cornelius T.
Format: Book
Language:English
Published: New York: Springer, c2006
Subjects:
Microelectromechanical systems > Design and construction
Physical Description:5 v. : ill. ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0387245200

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