|
|
|
|
LEADER |
00677nam a2200205 a 4500 |
001 |
893523 |
005 |
20171111231334.0 |
008 |
891120s gr gr 00010 eng d |
050 |
1 |
4 |
|a TK7871.85
|b .M585 1990
|
082 |
0 |
|
|2 20
|a 621.381/52
|
100 |
1 |
|
|a Morgan, D. V.
|
245 |
1 |
3 |
|a An introduction to semiconductor microtechnology /
|c D.V. Morgan, K. Board
|
250 |
|
|
|a 2nd ed.
|
260 |
|
|
|a Chichester ;
|
260 |
|
|
|a New York :
|b J. Wiley ,
|c c1990 .
|
300 |
|
|
|a xiv, 208 p. :
|b ill. ;
|c 24 cm.
|
504 |
|
|
|a Includes bibliographical references.
|
650 |
1 |
0 |
|a Semiconductors
|x Design and construction
|
700 |
1 |
|
|a Board, K.
|
952 |
|
|
|a GR-AtTEI
|b 59cc81836c5ad13446fdb4f0
|c 998a
|d 945l
|e -
|t 1
|x m
|z Books
|