An introduction to semiconductor microtechnology /

Main Author: Morgan, D. V.
Other Authors: Board, K.
Format: Book
Language:English
Published: Chichester ; J. Wiley , c1990 .
New York :
Edition:2nd ed.
Subjects:
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050 1 4 |a TK7871.85  |b .M585 1990 
082 0 |2 20  |a 621.381/52 
100 1 |a Morgan, D. V. 
245 1 3 |a An introduction to semiconductor microtechnology /  |c D.V. Morgan, K. Board 
250 |a 2nd ed. 
260 |a Chichester ; 
260 |a New York :  |b J. Wiley ,  |c c1990 . 
300 |a xiv, 208 p. :  |b ill. ;  |c 24 cm. 
504 |a Includes bibliographical references. 
650 1 0 |a Semiconductors  |x Design and construction 
700 1 |a Board, K. 
952 |a GR-AtTEI  |b 59cc81836c5ad13446fdb4f0  |c 998a  |d 945l  |e -  |t 1  |x m  |z Books