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|a 0471784060
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|a 621.381 52
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| 100 |
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|4 aut
|a May, Gary S.
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| 245 |
1 |
0 |
|a Fundamentals of semiconductor manufacturing and process control /
|c Gary S. May, Costas J. Spanos
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| 260 |
|
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|a Hoboken, NJ :
|b Wiley ,
|c c2006 .
|
| 300 |
|
|
|a xviii, 463 p. :
|b ill. ;
|c 24 cm.
|
| 500 |
|
|
|a Includes appendices .
|
| 504 |
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|a Includes bibliographical references and index
|
| 650 |
1 |
0 |
|a Semiconductors
|x Design and construction
|
| 650 |
1 |
0 |
|a Ολοκληρωμένα κυκλώματα
|x Σχέδιο και κατασκευή
|
| 650 |
1 |
0 |
|a Integrated circuits
|x Design and construction
|
| 650 |
1 |
0 |
|a Process control
|x Statistical methods
|
| 700 |
1 |
|
|a Spanos, Costas J.
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| 952 |
|
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|a GR-AtTEI
|b 59cc77586c5ad13446fbd21c
|c 998a
|d 945l
|e 621.381 5 MAY
|t 1
|x m
|z Books
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