Fundamentals of semiconductor manufacturing and process control /
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Hoboken, NJ :
Wiley ,
c2006 .
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| Item Description: | Includes appendices . |
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| Physical Description: | xviii, 463 p. : ill. ; 24 cm. |
| Bibliography: | Includes bibliographical references and index |
| ISBN: | 0471784060 |