Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI) /
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| Format: | Book |
| Language: | English |
| Published: |
Park Ridge, N.J., U.S.A.:
Noyes Publications,
c1988
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| Series: | Materials science and process technology series
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| Subjects: | |
| Online Access: | http://www.loc.gov/catdir/description/wap041/87031529.html |