Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI) /

Corporate Author: Noyes
Other Authors: McGuire, G. E.
Format: Book
Language:English
Published: Park Ridge, N.J., U.S.A.: Noyes Publications, c1988
Series:Materials science and process technology series
Subjects:
Online Access:http://www.loc.gov/catdir/description/wap041/87031529.html
LEADER 01162nam a2200241 a 4500
001 773627
005 20171111231145.0
008 040921s1988 gr r 000 0 eng d
020 |a 0815511507 
040 |a GR-KoDPT  |b gre  |e AACR2 
050 |a TK7874  |b .S4178 1988 
082 0 |2 19  |a 621.395 
245 0 0 |a Semiconductor materials and process technology handbook :  |b for very large scale integration (VLSI) and ultra large scale integration (ULSI) /  |c edited by Gary E. McGuire 
260 |a Park Ridge, N.J., U.S.A.:  |b Noyes Publications,  |c c1988 
300 |a xiii, 675 σ. :  |b εικ. ;  |c 25 εκ. 
490 0 |a Materials science and process technology series 
504 |a Περιέχει βιβλιογραφίες και ευρετήριο 
650 0 |a Integrated circuits  |x Very large scale integration  |x Design and construction  |x Handbooks, manuals, etc. 
650 0 |a Integrated circuits  |x Ultra large scale integration  |x Design and construction 
700 1 |a McGuire, G. E.  |x Handbooks, manuals, etc. 
710 |a Noyes 
856 4 0 |u http://www.loc.gov/catdir/description/wap041/87031529.html 
952 |a GR-KoDPT  |b 59cc2b9f6c5ad13446fa442e  |c 998a  |d 945l  |e TK 7874  |t 1  |x m  |z Books