Plasma etching : an introduction /
| Corporate Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Boston:
Academic Press,
c1989
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| Series: | Plasma - Materials interactions
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| Subjects: |
| Physical Description: | xii, 476 σ. : εικ. ; 24 εκ. |
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| Bibliography: | Περιέχει βιβλιογραφικές παραπομπές και ευρετήριο |
| ISBN: | 0124693709 |