New approaches to image processing based failure analysis of nano-scale ULSI devices /
Main Author: | Zalevsky, Zeev |
---|---|
Other Authors: | Livshits, Pavel, Gur, Eran |
Format: | Book |
Language: | English |
Published: |
Amsterdam :
Elsevier/William Andrew,
2014
|
Series: | Micro and Nano Technologies Series
|
Subjects: |
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