New approaches to image processing based failure analysis of nano-scale ULSI devices /

Main Author: Zalevsky, Zeev
Other Authors: Livshits, Pavel, Gur, Eran
Format: Book
Language:English
Published: Amsterdam : Elsevier/William Andrew, 2014
Series:Micro and Nano Technologies Series
Subjects:
Physical Description:101 p. : ill. ; 23 cm
Bibliography:Includes bibliographical references
ISBN:9780323241434