The science and engineering of microelectronic fabrication/
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| Corporate Author: | |
| Format: | Book |
| Language: | English |
| Published: |
New York:
Oxford University Press,
1996
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| Series: | Oxford series in electrical engineering
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| Subjects: |
| Physical Description: | xv, 536 σ. : εικ. ; 25 εκ. |
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| Bibliography: | Περιέχει βιβλιογραφικές παραπομπές και ευρετήριο Περιέχει βιβλιογραφία και ευρετήριο Includes bibliographical references and index Includes bibliographical references and index. |
| ISBN: | 0195105087 |