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01970nam a2200469 a 4500 |
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1952310 |
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20171111235836.0 |
| 008 |
030623s1997 gr r 000 0 eng d |
| 020 |
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|a 0852969066
|q τ. 1
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|a 0819423785
|q τ. 1 : US
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|a 0852969112
|q τ. 2
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|q τ. 2 : US
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|a GR-KoDPT
|b gre
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|a TK7836
|b .H3423 1997
|a TK7836
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|2 21
|a 670
|b .H3423 1997
|
| 082 |
0 |
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|2 21
|a 670
|
| 245 |
1 |
0 |
|a Handbook of microlithography, micromachining, and microfabrication/
|c P. Rai-Choudhury, editor
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| 246 |
1 |
3 |
|a Microlithography, micromachining, and microfabrication
|
| 260 |
1 |
3 |
|a Bellingham,:
|b SPIE Optical Engineering Press ;
|c c1997
|a London:
|b Institution of Electrical Engineers,
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| 300 |
1 |
3 |
|a 2 τ. :
|b εικ. ;
|c 26 εκ
|
| 490 |
0 |
3 |
|a IEE materials & devices series
|v 12
|
| 500 |
0 |
3 |
|a "SPIE Press monograph PM39."
|
| 500 |
1 |
3 |
|a Volume 1: 12
|
| 504 |
0 |
3 |
|a Περιέχει βιβλιογραφικές παραπομπές και ευρετήριο
|
| 504 |
0 |
3 |
|a Includes bibliographical references and indexes.
|
| 504 |
1 |
3 |
|a Includes bibliographical references and index.
|
| 505 |
0 |
3 |
|a τ. 1. Microlithography -- τ. 2. Micromachining and microfabrication
|
| 505 |
1 |
3 |
|a v. 1. Microlithography
|
| 505 |
1 |
3 |
|a v. 2. Micromachining and microfabrication .
|
| 650 |
1 |
0 |
|a Microlithography
|x Handbooks, manuals, etc.
|
| 650 |
1 |
0 |
|a Micromachining
|x Handbooks, manuals, etc.
|
| 650 |
1 |
0 |
|a Microfabrication
|x Handbooks, manuals, etc.
|
| 650 |
1 |
0 |
|a Microfabrication
|
| 650 |
1 |
0 |
|a Microlithography
|
| 650 |
1 |
0 |
|a Micromachining
|
| 650 |
1 |
0 |
|a Microlithography
|
| 650 |
1 |
0 |
|a Micromachining
|
| 700 |
1 |
0 |
|a Rai-Choudhury, P.
|
| 710 |
1 |
0 |
|a Society of Photo-optical Instrumentation Engineers
|
| 710 |
1 |
0 |
|a Institution of Electrical Engineers
|
| 952 |
|
|
|a GR-AtNTU
|b 59cc280d6c5ad13446f9ae55
|c 998a
|d 945l
|e 670 HAN
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| 952 |
|
|
|a GR-KoDPT
|b 59cc33f36c5ad13446fb110c
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|t 2
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|
