Cover Image

MEMS mechanical sensors /

Other Authors:	Beeby, Stephen.
Format:	Book
Language:	English
Published:	Boston : Artech House, ©2004.
Series:	Artech House microelectromechanical systems (MEMS) series
Subjects:	Microelectromechanical systems. Detectors. Microelectromechanical Systems. TECHNOLOGY & ENGINEERING > Sensors.
Online Access:	http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=112165

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