MEMS mechanical sensors /
| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boston :
Artech House,
©2004.
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| Series: | Artech House microelectromechanical systems (MEMS) series
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| Subjects: | |
| Online Access: | http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=112165 |
| Physical Description: | 1 online resource (x, 269 pages) : illustrations. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 1580538738 9781580538732 1580535364 9781580535366 |