Reliability of MEMS testing of materials and devices /
| Corporate Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Weinheim :
Wiley-VCH,
2013.
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| Series: | Advanced micro & nanosystems
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| Subjects: | |
| Online Access: | http://site.ebrary.com/lib/ucy/Doc?id=10682369 |
| Item Description: | First edition 2007. |
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| Physical Description: | xx, 303 p. : ill. |
| Bibliography: | Includes bibliographical references and index. |