Tabata, O. (2013). Reliability of MEMS: Testing of materials and devices. Weinheim: Wiley-VCH.
Chicago Style CitationTabata, Osamu. Reliability of MEMS: Testing of Materials and Devices. Weinheim: Wiley-VCH, 2013.
MLA CitationTabata, Osamu. Reliability of MEMS: Testing of Materials and Devices. Weinheim: Wiley-VCH, 2013.
Warning: These citations may not always be 100% accurate.