Microengineering, MEMS, and interfacing: a practical guide/

Main Author: Banks, Danny
Format: Book
Language:English
Published: Boca Raton, FL: CRC/Taylor & Francis, [c2006]
Series:Mechanical engineering (Taylor & Francis) 199
Subjects:
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245 1 0 |a Microengineering, MEMS, and interfacing:   |b a practical guide/  |c Danny Banks 
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300 |a 326 p. :  |b ill. ;  |c 24 cm. 
490 0 |a Mechanical engineering (Taylor & Francis)  |v 199 
504 |a Includes bibliographical references and index. 
650 0 |a Microelectromechanical systems 
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