Microengineering, MEMS, and interfacing: a practical guide/
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, FL:
CRC/Taylor & Francis,
[c2006]
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| Series: | Mechanical engineering (Taylor & Francis)
199 |
| Subjects: |
| Physical Description: | 326 p. : ill. ; 24 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0824723058 9780824723057 |