Modeling MEMS and NEMS/

Main Author: Pelesko, John A.
Other Authors: Bernstein, David H.
Format: Book
Language:English
Published: Boca Raton, FL: Chapman & Hall/CRC, c2003
Subjects:
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020 |a 1584883065  |q hbk. 
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050 |a TK7875.P45 2003 
100 1 |a Pelesko, John A. 
245 1 0 |a Modeling MEMS and NEMS/  |c John A. Pelesko and David H. Bernstein 
260 |a Boca Raton, FL:  |b Chapman & Hall/CRC,  |c c2003 
300 |a xxiii, 357 p. :  |b ill. ;  |c 24 cm. 
504 |a Includes bibliographical references and i(p. 325-340) and index. 
650 0 |a Microelectromechanical systems  |x Mathematical models 
700 1 |a Bernstein, David H. 
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