Description: Modeling MEMS and NEMS/

Main Author:	Pelesko, John A.
Other Authors:	Bernstein, David H.
Format:	Book
Language:	English
Published:	Boca Raton, FL: Chapman & Hall/CRC, c2003
Subjects:	Microelectromechanical systems > Mathematical models

Physical Description:	xxiii, 357 p. : ill. ; 24 cm.
Bibliography:	Includes bibliographical references and i(p. 325-340) and index.
ISBN:	1584883065