Description: Modern semiconductor fabrication technology /

Main Author:	Gise, Peter E.
Other Authors:	Blanchard, Richard.
Format:	Book
Language:	English
Published:	Englewood Cliffs, N.J. : Prentice-Hall, c1986.
Subjects:	Semiconductors > Design and construction. Integrated circuits > Design and construction.

Physical Description:	vii, 264 p. : ill. ; 25 cm.
Bibliography:	Includes bibliographies and index.
ISBN:	0835946843