Plasma electronics: applications in microelectronic device fabrication/
| Corporate Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
New York:
Taylor & Francis,
2006
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| Series: | Series in plasma physics / Steve Cowley
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| Subjects: |
| Βιβλιοθήκη | Ταξιθετικός αριθμός | Αριθμός Αντιτύπων | Πληροφορίες | Κατάσταση |
|---|---|---|---|---|
| ΑΣΠΑΙΤΕ | 621.044 MAK | 2 | Προβολή | OPAC |