Nano- and micro- electromechanical systems: fundamentals of nano and microengineering/
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton:
CRC Press,
2004
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| Series: | Nano- and microsience, engineering, technology, and medicine series. 8
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| Physical Description: | 722p. : ill. |
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| Bibliography: | Includes bibliography and index |
| ISBN: | 0849328381 |