Handbook of multilevel metallization for integrated circuits: : materials, technology, and applications/
| Other Authors: | , , |
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| Format: | Book |
| Published: |
Westwood, NJ. :
Noyes Publications,
c1993
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| Series: | Materials science and process technology series
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| Subjects: |
| Physical Description: | xxiii, 887 p. : : ill. ; ; 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0815513402 |