Description: Surface contamination and cleaning.

Corporate Author:	International Symposium on Surface Contamination and Cleaning Newark, N.J.)
Other Authors:	Mittal, K. L.,
Format:	Book
Language:	English
Published:	Utrecht ; Boston : VSP, 2003.
Subjects:	Surface contamination TECHNOLOGY & ENGINEERING > Nanotechnology & MEMS.
Online Access:	http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=117245

Physical Description:	1 online resource (1 volume) : illustrations
Bibliography:	Includes bibliographical references.
ISBN:	1417577843 9781417577842