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Hermeticity testing of MEMS and microelectronic packages /

Main Author:	Costello, Suzanne, (Author)
Other Authors:	Desmulliez, Marc P. Y.,
Format:	Book
Language:	English
Series:	Integrated microsystems series
Subjects:	Microelectromechanical systems. Microelectronics. Microelectromechanical systems > Testing. Microelectronics > Testing.
Online Access:	http://site.ebrary.com/lib/ucy/Doc?id=11069355

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