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Analysis and design principles of MEMS devices

Main Author:	Bao, Min-Hang.
Corporate Author:	ebrary, Inc.
Format:	Book
Language:	English
Published:	Amsterdam ; Oxford : Elsevier, c2005.
Subjects:	Microelectromechanical systems.
Online Access:	http://site.ebrary.com/lib/ucy/Doc?id=10138376

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