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01099nam a2200205 a 4500 |
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1794018 |
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20171111234540.0 |
| 008 |
110726t20112011sz ad ob 101 0 eng|d |
| 020 |
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|a 9783038136095(ebook)
|z 9783037851456 (pbk.)
|z 3037851457 (pbk.)
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| 040 |
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|a CaPaEBR
|b eng
|e rda
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| 050 |
1 |
4 |
|a TK7875
|b .I538 2011eb
|e pn
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| 111 |
2 |
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|a International Conference on Materials for Advanced Technologies
|c Singapore),
|d (2011 :
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| 245 |
1 |
0 |
|a NEMS/MEMS technology and devices :
|b selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore /
|c edited by Lynn Khine and Julius M. Tsai.
|
| 300 |
|
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|a 1 online resource (233 pages) :
|b illustrations (some color).
|
| 490 |
1 |
|
|a Advanced materials research,
|v volume 254
|x 1022-6680 ;
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| 504 |
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|a Includes bibliographical references and indexes.
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| 650 |
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0 |
|a Nanoelectromechanical systems
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| 700 |
1 |
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|a Khine, Lynn.
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| 856 |
4 |
0 |
|a Tsai, Julius M.
|u http://site.ebrary.com/lib/ucy/Doc?id=10817952
|
| 952 |
|
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|a CY-NiOUC
|b 5a0458976c5ad14ac1ed1951
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