Nano- and microelectromechanical systems: fundamentals of nano- and microengineering/

Main Author: Lyshevski, Sergey Edward
Format: Book
Language:English
Published: Boca Raton: CRC Press, c2001
Series:Nano- and microscience, engineering, technology, and medicine series
Subjects:
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300 |a 338 p. :  |b ill. ;  |c 25 cm. 
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504 |a Includes bibliographical references and index. 
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