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00788nam a2200193 a 4500 |
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1716823 |
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20171111234431.0 |
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031113s2001 cy da r 000 u eng d |
020 |
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|a 0849309166
|q hbk.
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040 |
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|a CY
|b University of Cyprus
|e AACR2
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050 |
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|a TK7875.L96 2001
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100 |
1 |
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|a Lyshevski, Sergey Edward
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245 |
1 |
0 |
|a Nano- and microelectromechanical systems:
|b fundamentals of nano- and microengineering/
|c Sergey Edward Lyshevski
|
260 |
|
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|a Boca Raton:
|b CRC Press,
|c c2001
|
300 |
|
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|a 338 p. :
|b ill. ;
|c 25 cm.
|
490 |
0 |
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|a Nano- and microscience, engineering, technology, and medicine series
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504 |
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|a Includes bibliographical references and index.
|
650 |
|
0 |
|a Microelectromechanical systems
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952 |
|
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|a CY-NiOUC
|b 5a044ceb6c5ad14ac1ebc906
|c 998a
|d 945l
|e TK7875.L96 2001
|t 1
|x m
|z Books
|