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00949nam a2200265 a 4500 |
| 001 |
1556607 |
| 005 |
20171111233643.0 |
| 008 |
080117s2006 cy da r 000 u eng d |
| 020 |
|
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|a 0849391393
|q hbk.
|
| 020 |
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|a 9780849391392
|q hbk.
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| 040 |
|
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|a CY
|b University of Cyprus
|e AACR-2
|
| 050 |
|
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|a TK7875.M423 2006
|
| 240 |
1 |
4 |
|a The MEMS handbook
|
| 245 |
1 |
0 |
|a MEMS applications:
|b applications/
|c edited by Mohamed Gad-el-Hak
|
| 246 |
1 |
3 |
|a The MEMS handbook
|
| 250 |
|
|
|a 2nd ed.
|
| 260 |
|
|
|a Boca Raton, FL:
|b CRC Press/Taylor & Francis,
|c [c2006]
|
| 300 |
|
|
|a 1 v. (various pagings) :
|b ill. (some col.) ;
|c 26 cm.
|
| 490 |
0 |
|
|a Mechanical engineering (Taylor & Francis)
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Microelectromechanical systems
|
| 650 |
|
0 |
|a Detectors
|
| 650 |
|
0 |
|a Microactuators
|
| 700 |
1 |
|
|a Gad-el-Hak, Mohamed ,
|
| 952 |
|
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|a CY-NiOUC
|b 5a04324b6c5ad14ac1e8f09b
|c 998a
|d 945l
|e TK7875.M423 2006
|t 1
|x m
|z Books
|
