CMOS-MEMS/

Other Authors: Brand, Oliver,, Fedder, Gary K.
Format: Book
Language:English
Published: Weinheim: Wiley-VCH, [c2005]
Series:Advanced micro & nanosystems 2
Subjects:
LEADER 00718nam a2200205 a 4500
001 1552542
005 20171111233640.0
008 071018s2005 cy da r 000 u eng d
020 |a 3527310800  |q bound 
040 |a CY  |b University of Cyprus  |e AACR-2 
050 |a TK7875.C667 2005 
245 1 0 |a CMOS-MEMS/  |c Baltes ...[et al.] (eds.) 
260 |a Weinheim:  |b Wiley-VCH,  |c [c2005] 
300 |a xiv, 594 p. :  |b ill. ;  |c 25 cm. 
490 0 |a Advanced micro & nanosystems  |v 2 
504 |a Includes bibliographical references and index. 
650 0 |a Metal oxide semiconductors, Complementary 
700 1 |a Brand, Oliver, 
700 1 |a Fedder, Gary K. 
952 |a CY-NiOUC  |b 5a0431a66c5ad14ac1e8dead  |c 998a  |d 945l  |e TK7875.C667 2005  |t 1  |x m  |z Books