Semiconductor manufacturing technology/

Main Author: Quirk, Michael, 1953-
Other Authors: Serda, Julian
Format: Book
Language:English
Published: Upper Saddle River, NJ.: Prentice Hall, 2001
Subjects:
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008 050318s2001 cy da r 000 u eng d
020 |a 0130815209  |q hbk. 
040 |a CY  |b University of Cyprus  |e AACR2 
050 |a TK7836.Q27 2001 
100 1 |a Quirk, Michael,  |d 1953- 
245 1 0 |a Semiconductor manufacturing technology/  |c Michael Quirk, Julian Serda 
260 |a Upper Saddle River, NJ.:  |b Prentice Hall,  |c 2001 
300 |a xiii, 666 p. :  |b ill. ;  |c 29 cm. 
504 |a Includes bibliographical references (p. 647) and index. 
650 0 |a Electronic industries 
650 0 |a Semiconductors  |x Design and construction 
700 1 |a Serda, Julian 
952 |a CY-NiOUC  |b 5a042b286c5ad14ac1e82957  |c 998a  |d 945l  |e TK7836.Q27 2001  |t 1  |x m  |z Books