Liu, C. (2006). Foundations of MEMS. Upper Saddle River, N.J.: Pearson Education.
Chicago Style CitationLiu, Chang. Foundations of MEMS. Upper Saddle River, N.J.: Pearson Education, 2006.
MLA CitationLiu, Chang. Foundations of MEMS. Upper Saddle River, N.J.: Pearson Education, 2006.
Warning: These citations may not always be 100% accurate.